专利名称：Method for producing a component
according to the anodic bonding methodand component
发明人：Helmut Baumann申请号：US08/511570申请日：19950804公开号：US05683947A公开日：19971104
摘要：An anodic bonding method allows uniform pressure on the components to bebonded. This is achieved in that the components which are bonded are structured suchthat cavities are formed between the components. The cavities are evacuated and thecomponents are thus pressed together during bonding.
申请人：ROBERT BOSCH GMBH
代理机构：Kenyon & Kenyon
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