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Ti2AlN涂层的制备

2020-10-23 来源:易榕旅网
46

6

Vol.46

No.6

20106

743—747ACTAMETALLURGICASINICAJun.2010pp.743–747

*

:2009–11–12,

:

,

,1983

,

DOI:10.3724/SP.J.1037.2009.00754

:2010–03–06

Ti–Al–N

Ti2AlN

,Ti

N,

,

Ti

Al

,

VanderWaals

,

[11]

.

,

(Ti,Al)N

Ti2AlN

,(Ti,Al)N

.

[12−17]

,Ti2AlN

,

MgO(111)

Al2O3(0001),

Ti2AlN(0001)

627—827.

Ti2AlN

Ti2AlN

.

,

(Ti,Al)N

744

46

1133794080−3002120796080−4003

125

81

40

80

−300

22.1

EPMA

XRD

XRD

3EPMA

XRD,

2

1.

,

Ti,Al

N

.

1

,Ti,AlN

211,

Ti2AlN

;2

,

Ti

N2

,Ti

,N

,

,Al

;

3,

Ti

Al

2

N,TiAl

,N

.

1

,

1

AlTi3N

Al

.AlTi3N

;

Al

,

,

.

2

,

Ti

N

,AlTi3N

.

3

,

Ti

,AlTi3N

Al

,Al

.

Ti–N

,

,

Ti–Al–N

TiNTi–

N

;Ti–Al

,

,Al

,

.

1

Ti,Al

N

2EPMA

Table2EPMAresultsofas–depositedcoatings

(molfraction,%)

Coating

Ti

Al

N

6

:(Ti,Al)N/Ti2AlN

745

746

46

6

:(Ti,Al)N/Ti2AlN

747

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