专利名称：PRE-POLYCOATING OF GLASS SUBSTRATES发明人：LAW, Kam, S.,MAYDAN, Dan申请号：EP01968159.2申请日：20010827公开号：EP1355864A2公开日：20031029
摘要：The upper method and apparatus for forming polysilicon layer are in pre-annealed glass substrate. In one aspect, this method includes loading in pre-annealedglass substrate in settling chamber, the pre-annealed glass substrate of deposition ofamorphous silicon layers, and anneals pre-annealed glass substrate to be formed onpolysilicon layer. Amorphous silicon layer can be seated in the manufacture polysiliconlayer for carrying out annealing steps in pre-annealed glass substrate. Deposition ofamorphous silicon layers before nitride layer and oxide skin(coating) can load, and annealto pre-annealed glass substrate.
申请人：Applied Materials, Inc.
地址：3050 Bowers Avenue Santa Clara,California 95054 US
国籍：US
代理机构：Bayliss, Geoffrey Cyril
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容