专利名称：ARRANGEMENT FOR THE ACTUATION OF
AT LEAST ONE ELEMENT IN AN OPTICALSYSTEM
发明人：Markus Hauf,Martin Latzel,Edwin Johan Buis申请号：US14795458申请日：20150709
公开号：US20150309305A1公开日：20151029
专利附图：
摘要：An arrangement for the actuation of an element in an optical system. Thearrangement includes first actuation and second actuation units for tilting the element
about at least two different tilting axes. The first and second actuation units respectivelyinclude a flexure unit arranged outside an area defined by the element. Each flexure unitincludes a first flexing element, rotatable with respect to a first axis of rotation, and asecond flexing element, rotatable with respect to a second axis of rotation. For eachflexure unit, the two associated axes of rotation intersect at a virtual connecting point ofthe flexure unit concerned to the optical element. The virtual connecting point is
arranged in the area defined by the element and defines a rotating point for the element.
申请人：Carl Zeiss SMT GmbH
地址：Oberkochen DE
国籍：DE
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