专利名称：Electroacoustic transducer, process of
producing the same and electroacoustictransducing device using the same
发明人：HIROSAKI, YUJI,TANAKA, KIYOAKI,KIMURA,
SHIRO,YAMAMOTO, IKUO
申请号：EP00309693申请日：20001102公开号：EP1100289A8公开日：20010829
摘要：An electroacoustic transducer comprises: a lower electrode; an upper electrodeincluding an oscillation portion and a support portion for supporting the oscillationportion at least at a part of a periphery of the oscillation portion; and an insulating layerfor insulating the lower electrode from the upper electrode, wherein the upper
electrode has an up and down in the oscillation portion and/or in the support portion toprovide a cavity between the upper electrode and the lower electrode.
申请人：SHARP KABUSHIKI KAISHA
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容