专利名称：Nanoscale displacement detector发明人：Robert C. Taber申请号：US11280365申请日：20051116
公开号：US20070107501A1公开日：20070517
专利附图：
摘要：A nanoscale displacement detector includes a cantilever integrated with anoptical resonator, referred to herein as a “microresonator.” The microresonator andcantilever are configured such that displacement of the cantilever relative to themicroresonator causes a change in the resonant frequency of the microresonator. The
change in the resonant frequency of the microresonator is used to monitor cantileverdisplacement. In an embodiment, the microresonator includes a cavity that faces thecantilever and the cantilever includes a protrusion that faces the microresonator and isaligned with the cavity.
申请人：Robert C. Taber
地址：Palo Alto CA US
国籍：US
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