METHOD FOR PRODUCING A COMPONENT, AND COMPONENT

专利名称：METHOD FOR PRODUCING A COMPONENT,

AND COMPONENT

发明人：GEIGER, Wolfram申请号：EP15704464.5申请日：20150211公开号：EP3110748B1公开日：20180110

摘要：In the method for producing a component, firstly a first layer composite iscreated which comprises a first substrate made of a conductive material and at least onetrench formed therein and filled with insulating material, wherein a first region of the firstsubstrate, at least on a first surface of the first substrate, is electrically insulated laterallyfrom other regions of the first substrate by the trench. A second layer composite is thencreated, which comprises the first layer composite and a structure layer. The structurelayer comprises an active structure of the component and is electrically conductive atleast in a first region which in a first region of the first substrate adjoins the first surfaceof the first substrate and is connected thereto in an electrically conductive manner. On asecond surface of the first substrate, which is located opposite the first surface of thefirst substrate, a first contact face is then created in the first region of the first substrate,wherein the first region of the first substrate is electrically insulated laterally from otherregions of the first substrate by the trench on the second surface of the first substrate.By virtue of the method, a component is obtained in which an electrical contact to thefirst region of a structure layer is possible by means of the first region of the firstsubstrate and the first contact face.

申请人：Northrop Grumman LITEF GmbH,NORTHROP GRUMMAN LITEFGMBH,NORTHROP GRUMMAN LITEF GMBH

地址：DE

国籍：DE

代理机构：Müller Hoffmann & Partner

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