专利名称:METHOD FOR MEASURING THE RESISTANCE
OF A COATED CONDUCTIVE LAYER
发明人:LEROUX, Charles,LEHMANN, Jonathan申请号:EP15195411.2申请日:20151119公开号:EP3023799B1公开日:20171115
摘要:the invention relates to a method for determining the electrical resistance (rsh),a target layer (9) is covered with an insulating layer (10), a measurement method usingmultiple collinear points (1, 2, 3, 4), the method comprising the following steps: i have aset of points (1, 2, 3, 4) to the surface (12) of the surface layer (11). - make electricalcontact between the points (1, 2, 3, 4, 5, 6, 7, 8) of the set of points, and the conductivelayer (9) by means of at least two electric reported each electrical breakdown is carriedout by applying a voltage (u +, u between two points the set of points are. - implement a(1 +) between a point of entry and exit point (i); - to measure a potential difference (v + -v -) between the two points of the set of points. - calculating sheet resistance (rsh) fromthe value of the current applied to the (i + 1) and the measured potential difference (v + -v -).
申请人:COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES,Commissariat à l'énergie atomique et aux énergies
alternatives,Commissariat à l'énergie atomique et aux énergies alternatives
地址:FR
国籍:FR
代理机构:Lebkiri, Alexandre
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