专利名称：ILLUMINATION OPTICAL SYSTEM发明人：Ikutoshi Fukushima申请号：US13292587申请日：20111109
公开号：US20120120469A1公开日：20120517
专利附图：
摘要：The region and spot size of light that irradiates a specimen are changed.Provided is an illumination optical system including beam-deflecting means for changingthe deflecting direction of light from a light source; a wavefront modulation device at aposition optically conjugate with the beam-deflecting means and capable of modulating
the wavefront of the light; a Fourier transform system that focuses the light from thewavefront modulation device and performs Fourier transformation thereon; an inverseFourier transform system that performs inverse Fourier transformation on the light fromthe Fourier transform system to form a collimated light beam; and an objective opticalsystem that focuses the light from the inverse Fourier transform system on an object,wherein the Fourier transform system includes a mechanism capable of changing thefocal length while maintaining the focal position at the inverse Fourier transform systemside at a fixed position.
申请人：Ikutoshi Fukushima
地址：Tokyo JP
国籍：JP
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