专利名称:Ferroelectric memory and method for
manufacturing the same
发明人:Takumi Mikawa申请号:US10957618申请日:20041005公开号:US06965141B2公开日:20051115
专利附图:
摘要:A capacitor upper electrode and a wiring are electrically connected to eachother by using a plug and a conductive layer formed below a capacitive element withoutusing a plug that directly connects the capacitor upper electrode to the wiring provided
thereon via an interlayer insulating film therebetween. Alternatively, the capacitor upperelectrode is covered by a conductive hydrogen barrier film, and the capacitor upperelectrode and the wiring are electrically connected to each other via both a plugconnecting the wiring and the conductive hydrogen barrier film to each other and theconductive hydrogen barrier film.
申请人:Takumi Mikawa
地址:Kyoto JP
国籍:JP
代理机构:Nixon Peabody LLP
代理人:Donald R. Studebaker
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