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Ferroelectric memory and method for manufacturing

2023-11-14 来源:易榕旅网
专利内容由知识产权出版社提供

专利名称:Ferroelectric memory and method for

manufacturing the same

发明人:Takumi Mikawa申请号:US10957618申请日:20041005公开号:US06965141B2公开日:20051115

专利附图:

摘要:A capacitor upper electrode and a wiring are electrically connected to eachother by using a plug and a conductive layer formed below a capacitive element withoutusing a plug that directly connects the capacitor upper electrode to the wiring provided

thereon via an interlayer insulating film therebetween. Alternatively, the capacitor upperelectrode is covered by a conductive hydrogen barrier film, and the capacitor upperelectrode and the wiring are electrically connected to each other via both a plugconnecting the wiring and the conductive hydrogen barrier film to each other and theconductive hydrogen barrier film.

申请人:Takumi Mikawa

地址:Kyoto JP

国籍:JP

代理机构:Nixon Peabody LLP

代理人:Donald R. Studebaker

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