专利名称：Measuring tip for high-frequency
measurement
发明人：Steffen Thies,Michael Wollitzer申请号：US11721628申请日：20051121公开号：US07786741B2公开日：20100831
专利附图：
摘要：The invention relates to a contact arrangement for a measuring probe or ameasuring head for measuring high frequency, especially on a semiconductor wafer. Thearrangement comprises a contact end for electrically contacting planar structures. A
coplanar conductor structure having at lease two conductors carried by a dielectric isprovided at the contact end. Between the dielectric and the contact end, the measuringtip is configured in such a manner that the conductors of the coplanar conductorstructure are disposed in mid-air and in a resilient manner in relation to the dielectricretaining them. The invention is characterized in that the dielectric is provided with atleast one arrangement for transmitting electrical signals, the arrangement beingelectrically connected to at least one conductor of the conductor structure in such amanner that the arrangement transmits signals from the at least one conductor that iselectrically connected to the arrangement.
申请人：Steffen Thies,Michael Wollitzer
地址：Waging DE,Fridolfing DE
国籍：DE,DE
代理机构：DeLio & Peterson, LLC
代理人：Robert Curcio
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