Arrangement for coating a substrate

专利名称：Arrangement for coating a substrate发明人：Uwe Hoffmann,Manfred Schreil,Jose Manuel

Dieguez-Campo,Marcus Bender

申请号：US11254425申请日：20051020

公开号：US20060130765A1公开日：20060622

专利附图：

摘要：The invention relates to an arrangement for the coating of substrates, whichcomprises an evaporation source and a vapor barrier between the evaporation sourceand the substrate. The vapor barrier is maintained at a temperature which is at least

equal to or above the vaporization temperature of the material to be vaporized. Thevapor barrier is implemented as a quartz valve, which includes a spherical closure partconnected with a movable rod. In a first position this spherical closure part closes a vaporconducting tube, which is connected with the evaporation source, and, in a second

position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.

申请人：Uwe Hoffmann,Manfred Schreil,Jose Manuel Dieguez-Campo,Marcus Bender

地址：Alzenau DE,Dresden DE,Hanau DE,Hanau DE

国籍：DE,DE,DE,DE

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