专利名称：GAS PANEL
发明人：REDEMANN, Eric, J.,VU, Kim, N.申请号：EP98956297.0申请日：19981028公开号：EP1040292B1公开日：20070228
摘要：A gas panel (10) includes a one-piece manifold body (118) having an inlet (100)having an inlet (100) and a lateral wall defining at least one active device station.
申请人：CELERITY INC
地址：US
国籍：US
代理机构：Earnshaw, Geoffrey Mark
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