专利名称：Cleaning apparatus and cleaning method发明人：Ryosuke Yonekura,Yukiko Nishioka,Mitsuo
Miyashita,Yoshikazu Ariga
申请号：US10614295申请日：20030708
公开号：US20040065352A1公开日：20040408
专利附图：
摘要：In order to provide a cleaning apparatus and a cleaning method whereincleaning and drying can be carried out in the same cleaning apparatus without risk ofreverse contamination of the cleaned object after the drying process, a cleaning
apparatus comprises a supporting device for supporting an object to be cleaned, and acleaning cup surrounding said supporting device to prevent splashing of a cleaning liquid,said cleaning apparatus comprising: a cleaning device for cleaning an inner wall of saidcleaning cup with a cleaning liquid.
申请人：YONEKURA RYOSUKE,NISHIOKA YUKIKO,MIYASHITA MITSUO,ARIGAYOSHIKAZU
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