专利名称：Microelectromechanical resonator structure,
and method of designing, operating andusing same
发明人：Markus Lutz,Aaron Partridge申请号：US11132941申请日：20050519公开号：US07205867B2公开日：20070417
专利附图：
摘要：A micromechanical resonator structure including a plurality of straight orsubstantially straight beam sections that are connected by curved or rounded sections.
Each elongated beam section is connected to another elongated beam section at a distalend via the curved or rounded sections thereby forming a geometric shape having atleast two elongated beam sections that are interconnected via curved or roundedsections (for example, a rounded triangle shape, rounded square or rectangle shape).The structure includes one or more nodal points or areas (i.e., portions of the resonatorstructure that are stationary, experience little movement, and/or are substantiallystationary during oscillation of the resonator structure) in one or more portions or areasof the curved sections of the structure. The nodal points are suitable and/or preferablelocations to anchor the resonator structure to the substrate. In operation, the resonatorstructure oscillates in a combined elongating (or breathing) mode and bending mode;that is, the beam sections (which oscillate or vibrate at the same frequency) exhibit anelongating-like (or breathing-like) motion and a bending-like motion.
申请人：Markus Lutz,Aaron Partridge
地址：Palo Alto CA US,Palo Alto CA US
国籍：US,US
代理人：Neil A. Steinberg
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