LOW-VOLTAGE MEMS OSCILLATOR

申请(专利)号： KR20077025840

专利号： KR20080002933A 主分类号： H03H9/02 申请权利人： NXP B.V. 公开国代码： KR 优先权国家： EP

申请日： 2007-11-07 公开公告日： 2008-01-04

分类号： H03H9/02

发明设计人： SIX JEAN CLAUDE 申请国代码： KR

优先权： 20050408 EP

05300262.2

摘 要 附 图：

摘 要：

An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate (104) a moveable element (102) which is

moveable with respect to the substrate (104) and an actuating means and a sensor. The actuating means is used to induce vibration of the moveable element (102) and comprises two inductive

elements, a first one provided fixed to the substrate (104) and a second one

provided fixed to the moveable element (102). The induced vibration of the

moveable element (102) is sensed using the sensor and converted into an electric oscillating signal. The signal may be amplified and used for at least partly powering the actuating means, such that an oscillating signal at a stable resonance frequency and with a fixed amplitude can be obtained. The different components are highly integratable on chip. 主权项：

초소형 전자기계 시스템(micro-electromechanical system)을 기반으로 전기

발진신호를 발생하기 위한 전자 장치(100, 200, 300, 400, 500)에

权 利 要 求 说 明 书

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说 明 书

【LOW-VOLTAGE MEMS OSCILLATOR】的说明书内容是......请下载后查看